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      HORIBA質量流量控制器

      D212 D214壓力鈍感質量流量計

      產品分類:HORIBA質量流量控制器

      產品介紹

      概要

      高穩定性的質量流量計-氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測,采用壓力鈍感模式

      特征

      • 采用不同壓力感測即鈍感模式
      • 縮小氣體柜的體積(不再需要壓力傳感器,調壓閥和過濾器)
      • 流量控制量程范圍廠
      • 精度高
      • 提高產能-可以提供標準流量給半導體制程。

      規格

       

       

      D212

       Maximum Full-Scale (N2)

      10 / 20 / 30 / 40sccm

      50sccm ~ 10slm

       Operating  Inlet  Pressure

      14kPa (g) ~ 350kPa (g)

      250kPa(g) ~ 350kPa(g)

       Maximum Outlet  Pressure

      ≤13.3kPa (a)

      ≤53.3kPa (a)

      ≤13.3kPa(a)

      ≤53.3kPa(a)

       Accuracy under Digital mode
        (per SEMI Standard E56-1296)

      ±1% S.P.
      (35 ~ 100%)
      ±0.35% F.S.
      (2.5 ~ 35%)   

      ±1% S.P.
      ( 50 ~ 100%)
      ±0.5% F.S.
      (30 ~ 50%)  

      ±1% S.P.
      ( 5 ~ 100%)
      ±0.05% F.S.
      (0.5 ~ 5%) 

      ±1% S.P.
      ( 10 ~ 100%)
      ±0.1% F.S.
      (2 ~ 10%)  

       Control Range under Digital mode (% F.S.)

      2.5% ~ 100%

      30 ~ 100% 

       0.5 ~ 100%

      2 ~ 100%

       Recommended Re-Zero Term

      once/ year

       Valve Type (PIEZO)

      Normally Close

       Linearity

        ±0.5% F.S.

       Repeatability

      ±0.3% S.P. ( 10~100%)
      ±0.03% F.S. ( <10%)

       Response Time

       800 msec.

       Proof Pressure

      500kPa(g)

       Burst Pressure

      1MPa(g)

       Leak Integrity

      <5×10-12 Pa·m3/s (He)

       Wetted Materials

      SUS-316L , INCONEL

       Operating Temperature

      15 ~ 45°C

       Flow Rate Setting Signal

      0 ~ 5VDC or RS485 F-NET Protocol

       Flow Rate Output Signal

      0 ~ 5VDC or RS485 F-NET Protocol

       Power Requirement

      ± 15V ± 5%, 150 mA 

       Fittings

      1.125inch width 1/4VCR , C-seal , W-seal

       Installation Orientation

      Attitude Insensitive

       

      D214

      Maximum Full-Scale (N2)

      10 / 20 / 30 / 40sccm

      50sccm ~ 10slm

      Operating Inlet Pressure

      14kPa (g) ~ 350kPa (g)

      250kPa(g) ~ 350kPa(g)

      Maximum Outlet Pressure

      ≤13.3kPa (a)

      ≤53.3kPa (a)

      ≤13.3kPa(a)

      ≤53.3kPa(a)

      Accuracy under Digital mode
      (per SEMI Standard E56-1296)

      ±1% S.P. (35 ~ 100%)
      ±0.35% F.S. (2.5 ~ 35%)

      ±1% S.P. ( 50 ~ 100%)
      ±0.5% F.S. (30 ~ 50%)

      ±1% S.P. ( 5 ~ 100%)
      ±0.05% F.S. (0.5 ~ 5%)

      ±1% S.P. ( 10 ~ 100%)
      ±0.1% F.S. (2 ~ 10%)

      Control Range under Digital mode

      2.5% ~ 100% F.S.

      30 ~ 100% F.S.

      0.5 ~ 100% F.S.

      2 ~ 100% F.S.

      Recommended Re-Zero Term

      once/ year

      Valve Type (PIEZO)

      Normally Close

      Linearity

      ±0.5% F.S.

      Repeatability

      ±0.3% S.P. ( 10~100%)
      ±0.03% F.S. ( <10%)

      Response Time

      800 msec.

      Proof Pressure

      500kPa(g)

      Burst Pressure

      1MPa(g)

      Leak Integrity

      <5×10 -12 Pa·m 3 /s (He)

      Wetted Materials

      SUS-316L , INCONEL

      Operating Temperature

      15 ~ 45°C

      Flow Rate Setting Signal

      Device Net

      Flow Rate Output Signal

      Device Net

      Power Requirement

      11~25VDC 4VA

      Fittings

      1.125inch width 1/4VCR , C-seal , W-seal

      Installation Orientation

      Attitude Insensitive

      NOTE

       

      There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.

       

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