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        Z512, Z522 Digital / Analog

        Mass Flow Controller / Meter

        SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

        SEC-Z512X SEC-Z522XN SEC-Z522X

        SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

        SEF-Z512X SEF-Z522XN SEF-Z522X

        Full-scale flow rate MR/MG number

        (N2 conversion flow rate) #R01:10SCCM













        Valve Type

        Flow rate at fully closed control valve

        Flow rate control range

        Flow rate measuring range (SEF)

        Operating temperature




        50 to 300 kPa (d)

        #5.5, #06: 100 to 300 kPa (d)

        Operating differential pressure (SEF)

        MAX. Operating pressure

        Pressure resistance

        Leak Integrity

        Flow rate setting signal

        Flow rate output signal

        Wetted materials

        1/4 inch VCR equivalent

        Option: 1.125 inch IGS

        Mounting orientation

        *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

        by the operator, using special software.

        *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

        associated with the full-scale MR and MG number values.

        *3 IGS: Integrated Gas System

        * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

        Mass flow controller model *1 SEC-Z512KX

        Mass flow meter model *1 SEF-Z512KX

        O: Normally open C: Normally closed

        ≤ 2% F.S.

        2-100% of F.S.


        MR/MG number

        #6.5: 22SLM

        #07: 30SLM

        #08: 50SLM

        0-100% of F.S.

        Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

        ±0.25%F.S.(Flow rate≤25%F.S.)

        5 to 50°C (recommended temperature range: 15 to 45°C)

        ≤ 1 second: Over full flow rate range

        ≤ ±0.5% F.S.

        ≤ ±0.2% F.S.

        Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

        ≤ 300 kPa (d)

        450 kPa (g)

        1000 kPa (g)

        ≤ 5 x 10-12 Pa·m3/s (He)

        0.1 to 5 V DC (2% to F.S.); Input impedance 1 Mù or higher

        0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kù or higher

        Digital interface

        With address function: RS-485 (transmission speed 38,400 bps)

        F-Net Protocol

        316L Stainless Steel (polished surface)

        Power supply

        +15V±5% 150mA

        -15V±5% 150mA

        Signal response

        Analog: D-Sub 9-pin (TOP)

        Digital: 2 LAN jacks (TOP)

        Standard Fitting *3

        1/4 inch VCR equivalent

        Option: 1.125 inch IGS, 1.5 inch IGS

        1.5 inch IGS


        Z512/522 Web Ver.001

        Subject to change without notice.

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