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      HORIBA質量流量控制器

      SEC-Z512MGX質量流量控制器

      產品分類:HORIBA質量流量控制器

      產品介紹

      Z512, Z522 Digital / Analog
      Mass Flow Controller / Meter
      SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX
      SEC-Z512X SEC-Z522XN SEC-Z522X
      SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX
      SEF-Z512X SEF-Z522XN SEF-Z522X
      Full-scale flow rate MR/MG number
      (N2 conversion flow rate) #R01:10SCCM
      #R1.5:17.5SCCM
      #01:30SCCM
      #1.5:55SCCM
      #02:100SCCM
      #2.5:175SCCM
      #03:300SCCM
      #3.5:550SCCM
      #04:1SLM
      #4.5:1.75SLM
      #05:3SLM
      #5.5:5.5SLM
      #06:10SLM
      Valve Type
      Flow rate at fully closed control valve
      Flow rate control range
      Flow rate measuring range (SEF)
      Operating temperature
      Response
      Linearity
      Repeatability
      50 to 300 kPa (d)
      #5.5, #06: 100 to 300 kPa (d)
      Operating differential pressure (SEF)
      MAX. Operating pressure
      Pressure resistance
      Leak Integrity
      Flow rate setting signal
      Flow rate output signal
      Wetted materials
      1/4 inch VCR equivalent
      Option: 1.125 inch IGS
      Mounting orientation
      *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed
      by the operator, using special software.
      *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
      associated with the full-scale MR and MG number values.
      *3 IGS: Integrated Gas System
      * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
      Mass flow controller model *1 SEC-Z512KX
      Mass flow meter model *1 SEF-Z512KX
      O: Normally open C: Normally closed
      ≤ 2% F.S.
      2-100% of F.S.
      1/2SCCM
      MR/MG number
      #6.5: 22SLM
      #07: 30SLM
      #08: 50SLM
      0-100% of F.S.
      Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)
      ±0.25%F.S.(Flow rate≤25%F.S.)
      5 to 50°C (recommended temperature range: 15 to 45°C)
      ≤ 1 second: Over full flow rate range
      ≤ ±0.5% F.S.
      ≤ ±0.2% F.S.
      Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
      ≤ 300 kPa (d)
      450 kPa (g)
      1000 kPa (g)
      ≤ 5 x 10-12 Pa·m3/s (He)
      0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher
      0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher
      Digital interface
      With address function: RS-485 (transmission speed 38,400 bps)
      F-Net Protocol
      316L Stainless Steel (polished surface)
      Power supply
      +15V±5% 150mA
      -15V±5% 150mA
      Signal response
      Analog: D-Sub 9-pin (TOP)
      Digital: 2 LAN jacks (TOP)
      Standard Fitting *3
      1/4 inch VCR equivalent
      Option: 1.125 inch IGS, 1.5 inch IGS
      1.5 inch IGS
      Free
      Z512/522 Web Ver.001
      Subject to change without notice.

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